The IG5 is a cold-cathode ion source which operates at low gas flow rates, and is ideal for ion cleaning and sputtering applications. It requires minimal maintenance due the absence of a filament.
The IG5 is a cold-cathode ion source which operates at low gas flow rates, and is ideal for ion cleaning and sputtering applications. It requires minimal maintenance due the absence of a filament.
![Low cost ion source Model IG5](/wp-content/uploads/sites/225/2021/12/DCP_1289-1024x402.jpg)
Ion beam energy is variable over the range 1-5keV. The ion current is a function of both gas flow and anode voltage, allowing a wide range of operating conditions.
The graphs below show, respectively, ion current and beam profile data
![Low cost ion source Model IG5](/wp-content/uploads/sites/225/2021/10/mig5data2.png)
![Low cost ion source Model IG5](/wp-content/uploads/sites/225/2021/10/mig5data1.png)
Specification |
Model IG5 In-vacuum diameter34mm In-vacuum length56 mm for standard source 84 mm with focus XY. Mounting flangeNW35CF Ion beam energy1-5 keV Maximum beam current150uA Operating gas flow1-5 sccm Gas controlIntegral valve Beam divergence 15otypicalWater coolingNot required Operation temperatureAmbient |
Download the brochure in PDF format: IG5 |