The IG5 is a cold-cathode ion source which operates at low gas flow rates, and is ideal for ion cleaning and sputtering applications. It requires minimal maintenance due the absence of a filament.
The IG5 is a cold-cathode ion source which operates at low gas flow rates, and is ideal for ion cleaning and sputtering applications. It requires minimal maintenance due the absence of a filament.
Ion beam energy is variable over the range 1-5keV. The ion current is a function of both gas flow and anode voltage, allowing a wide range of operating conditions.
The graphs below show, respectively, ion current and beam profile data
| Specification |
| Model IG5 In-vacuum diameter34mm In-vacuum length56 mm for standard source 84 mm with focus XY. Mounting flangeNW35CF Ion beam energy1-5 keV Maximum beam current150uA Operating gas flow1-5 sccm Gas controlIntegral valve Beam divergence 15otypicalWater coolingNot required Operation temperatureAmbient |
| Download the brochure in PDF format: IG5 |
