|Standard In-vacuum length||290mm||250mm||290mm||290mm||212mm|
|Max. operating power||400W||400W||600W||600W||1200W|
|Flux||Variable – can be >1×1016 atoms/cm2/sec at 100mm|
|Beam divergence||Variable – can be specified between 5o and 20o (half angle)|
|Standard equipment||Source, RF cable|
|Services||0.5l/min water cooling|
In addition to our standard models, we also manufacture sources geared to a particular application. We can recommend optimum working distances and supply apertures to give the best possible uniformity at a specified distance.