| Model | HD20 | HD25R | HD25 | HD60 | HD150 |
| In-vacuum length | 34mm | 50/42mm | 57mm | 96mm | 196mm |
| Standard In-vacuum length | 290mm | 250mm | 290mm | 290mm | 212mm |
| Beam diameter | 20mm | 20mm | 25mm | 50mm | 212mm |
| Mounting flange | NW35CF | NW63CF | NW63CF | NW100CF | NW200CF |
| Max. operating power | 400W | 400W | 600W | 600W | 1200W |
| Flux | Variable – can be >1×1016 atoms/cm2/sec at 100mm | ||||
| Beam divergence | Variable – can be specified between 5o and 20o (half angle) | ||||
| Standard equipment | Source, RF cable | ||||
| Services | 0.5l/min water cooling |
Specials
In addition to our standard models, we also manufacture sources geared to a particular application. We can recommend optimum working distances and supply apertures to give the best possible uniformity at a specified distance.
