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Integrated glovebox
Valved RF crackers
Valved Organic Evaporators
Nanocluster solutions
Mini e-beam evaporators
Thermal gas crackers
RF atom sources
RF ion sources
DC ion sources
Low energy ion sources
Ion milling systems
Ionised beam K-cells
Mini ion guns
Compound dissociation K-cell
Gas dosers
RF Atom Sources - Specifications
Model
HD20
HD25R
HD25
HD60
HD150
In-vacuum length
34mm
50/42mm
57mm
96mm
196mm
Standard In-vacuum length
290mm
250mm
290mm
290mm
212mm
Beam diameter
20mm
20mm
25mm
50mm
150mm
Mounting flange
NW35CF
NW63CF
NW63CF
NW100CF
NW200CF
Max. operating power
400W
400W
600W
600W
1200W
Flux
Variable - can be >1x10
16
atoms/cm
2
/sec at 100mm
Beam divergence
Variable - can be specified between 5
o
and 20
o
(half angle)
Standard equipment
Source, RF cable, manual tuning unit, water-flow switch
Services
0.5l/min water cooling
Operating pressure
Can operate up to a chamber pressure of 5x10
-3
mbar
Specials
In addition to our standard models, we also manufacture sources geared to a particular application. We can recommend optimum working distances and supply apertures to give the best possible uniformity at a specified distance.
Last updated: 23rd July 2010
Copyright 2008 The Vacutec Group
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