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Low Energy Ion Source
Model LIon50
The LIon50 is a low energy gas ion source which operates on the principle of electron impact ionisation. It is capable of producing ion beams with energies between 30eV and 1keV with very narrow energy spread. The source is compatible with a variety of gases, including reactive gases such as O
2
. Applications include ion spectroscopy, e-beam neutralisation and substrate cleaning. The instrument incorporates highly efficient water cooling to ensure minimal outgassing during operation.
Specification
Model
LION50
In-vacuum diameter
34mm
In-vacuum length
200mm (standard)
Mounting flange
NW35CF
Ion beam energy
30-1keV
Total beam current
30uA*
Ionising beam current
200mA (max)
Operating gas flow
0-0.5sccm
Beam divergence
15
o
typical
Services
0.5l/min water cooling
Options
Focusing
X, Y deflection
Automated beam rastering
Software remote control (USB interface)
Download the brochure in PDF format:
LIon50
Last updated: 23rd July 2010
Copyright 2008 The Vacutec Group
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