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  • Low ion-beam energy
  • Narrow energy spread
  • Ultra-clean operation
  • Spare filament
Low Energy Ion Source
Model LIon50
The LIon50 is a low energy gas ion source which operates on the principle of electron impact ionisation. It is capable of producing ion beams with energies between 30eV and 1keV with very narrow energy spread. The source is compatible with a variety of gases, including reactive gases such as O2. Applications include ion spectroscopy, e-beam neutralisation and substrate cleaning. The instrument incorporates highly efficient water cooling to ensure minimal outgassing during operation.


Model LION50

In-vacuum diameter 34mm

In-vacuum length 200mm (standard)

Mounting flange NW35CF

Ion beam energy 30-1keV

Total beam current 30uA*

Ionising beam current 200mA (max)

Operating gas flow 0-0.5sccm

Beam divergence 15o typical

Services 0.5l/min water cooling


X, Y deflection

Automated beam rastering

Software remote control (USB interface)

Download the brochure in PDF format: LIon50