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Low cost
1-5 keV beam energy
No filament
Instant start-up
Integral valve (no chamber back-filling required)
Low cost ion source
Model IG5
The IG5 is a cold-cathode ion source which operates at low gas flow rates, and is ideal for ion cleaning and sputtering applications. It requires minimal maintenance due the absence of a filament.
Ion beam energy is variable over the range 1-5keV. The ion current is a function of both gas flow and anode voltage, allowing a wide range of operating conditions. Optionally it can be supplied with focusing, X, Y deflection and beam scanning.
The graphs below show, respectively, ion current and beam profile data
Specification
Model
IG5
In-vacuum diameter
34mm
In-vacuum length
56 mm for standard source 84 mm with focus XY.
Mounting flange
NW35CF
Ion beam energy
1-5 keV
Maximum beam current
150uA
Operating gas flow
1-5 sccm
Gas control
Integral valve
Beam divergence
15
o
typical
Water cooling
Not required
Operation temperature
Ambient
Options
Focus, X/Y deflection
UHV>
Bakeable to 250
o
C
Download the brochure in PDF format:
IG5
Last updated: 23rd July 2010
Copyright 2008 The Vacutec Group
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