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DC Ion Sources - Specifications

Model


DC25

DC25s 

In-vacuum length


100mm

100mm

Beam diameter


25mm

25mm

Mounting flange


NW63CF

NW63CF

Ion beam energy


150-1000eV

10-200eV

Beam current


20mA (max)**

5mA (max)

Operating gas flow


3-10sccm

3-10sccm

Power supplies


screen and accelerator grids

screen and accelerator grids

Water cooling


0.5l/s at 20 oC

0.5l/s at 20 oC

**Gas dependent



Options

Filament bridge neutraliser

Piezoelectric gas doser

Isolated shutter

Custom length/ special flange mounting